Frontier
Outstanding heater performance Frontier is designed for heating chemicals and solvents in hazardous operating environments. Suitable for heating a wide variety of flammable and non-flammable chemistries using electro polished stainless steel wetted materials for improved cleanliness. Offers outstanding performance over a wide range of flow and temperature requirements. Heat source isolated from flammable chemistries. Certified to UL823 compliant and ATEX Suitable for Class I, Div 2 and Zone 1&2 hazardous environments. Available up to 36kW, the Frontier is the most powerful inline solvent heater available. Up to 356°F (180°C) Applications • Semiconductor • Sterilization/Cleaning • Electroless Nickel Plating
|
Nexus
Multi-loop chemical heater Engineered for your process – manage multiple chambers with one precise and stable heater! Building off the popular SHC product line, the Nexus incorporates the same safe indirect heating technology to heat multiple process loops. Using a single heat source, the Nexus improves chamber-temperature matching performance for advanced processing requirements. PFA wetted surfaces. Low-watt density design for lower surface temperature. Heats up to 176°F (80°C) Applications • Semiconductor Wafer Cleaning • Point of Use Heating (POU)
|
SHB / SHC
Superior indirect heating The SHB/SHC, a low wattage inline chemical/solvent heater, delivers superior indirect heating with temperature stability. Using multiple temperature sensors and seld-limiting technology, this heater ensures safe operation during low or no-flow conditions. SHB series: Electro polished 316 Stainless steel for solvents. SHC series: PTFE & PFA wetted surfaces for acids and solvents. Heats up to 356°F (180°C) Applications • Semiconductor Wafer Cleaning • Point of Use Heating (POU) • Etching • Inline Chemical Heating
|
SHX (NEW!!!)
SHX is a compact high-performance heater designed to safely heat isopropyl alcohol (IPA), meeting the most stringent cleanliness requirements to support next generation semiconductor node technologies. The newest Process Technology inline solvent heater. SHX is a compact high-performance heater designed to safely heat isopropyl alcohol (IPA). Chemistry contained within high-purity PTFE components-no contact with any metals. Supports recirculating and single pass flow requirements. This is the ultimate in high-purity solvent heating! Ask about our customized to your tool and explosion proof design (SHX-EX) options. Heats up to 194°F (90°C) Applications • Semiconductor Wafer Cleaning • Flammable Solvent Heating • Acid Heating and Corrosive Chemical Heating • UltraHigh Purity Heating • Chemical Heating
|